Apter Power provides MKS spare parts and service. We provide a full one year warranty on MKS parts, including new original, discontinued inventory.
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The MKS CDN500-19 0190-07970 Interlock Module is an industrial safety control module designed for interlock logic management in semiconductor equipment.
The MKS 902-1112 pressure sensor integrates a compact design, integrated electronics, and sensor into a single unit, enabling fast, accurate, and repeatable pressure readings, thereby shortening process cycles.