Features:
- High-speed interlock control with response time ≤ 5ms, ensuring fast and reliable safety execution in automation systems.
- Integrated Ethernet communication with Modbus/TCP protocol for stable industrial network connectivity.
- Built-in JavaScript-based logic processing for flexible and distributed automation control.
The MKS CDN500-19 0190-07970 Interlock Module is widely applied in semiconductor manufacturing systems where safety and precision control are required. The MKS CDN500-19 0190-07970 operates with 100BT Ethernet communication and Modbus/TCP protocol, ensuring reliable integration into distributed control architectures.
The MKS CDN500-19 0190-07970 is equipped with a built-in processor supporting JavaScript-based logic execution, enabling advanced interlock functions within complex industrial environments. The MKS CDN500-19 0190-07970 also provides full I/O response within 5ms, ensuring fast safety reaction performance.
The MKS CDN500-19 0190-07970 is designed for MKS 3U standard card cage systems and operates under -40°C to +85°C conditions with 5–10W power consumption. The MKS CDN500-19 0190-07970 ensures stable operation in semiconductor tools, especially in Applied Materials systems where safety interlock control is critical.
The CDN500-19 0190-07970 MKS Interlock Module may still be available for purchase and support from Apter Power beyond End-Of-Life (EOL) by the manufacturer (OEM).
MKS CDN500-19 0190-07970 Interlock Module Manuals,Datasheets,Link
Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.
MKS CDN500-19 0190-07970 Interlock Module Specs
General
- Manufacturer MKS
- Model CDN500-19 0190-07970
- Condition New Original ready stock
- Product Family CDN500-19,CDN500-4-10190-37669,CDN500-14 0190-04849
Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.
- Multi-Signal Integration: Monitors multiple sets of analog, digital, and serial signals in a 3U high-density slot, ensuring that cavity environmental parameters remain within safe ranges.
- High-Speed Status Refresh: Provides approximately 5ms I/O response time, ensuring continuous high-frequency monitoring of the interlocking status of cavity gate valves and RF power supplies.
- Distributed Logic Management: As a network I/O node, this module can execute preset monitoring logic locally, reducing the computational load on the central control PC.
- IoT Connectivity: Distributed monitoring data is transmitted in real-time to the factory's main control system via standard Ethernet, enabling centralized management of the semiconductor production line.
- Semiconductor Etching/Vacuum Deposition: Primarily used in AMAT Producer SE series cavities to manage cavity interlocks during thin film deposition or etching.
- Personnel and Equipment Safety: When a maintenance door is detected to be open or an abnormal vacuum level is detected, the module immediately executes interlock actions, forcibly shutting down the high pressure or cutting off the gas supply.
- Production Process Synchronization Control: During automatic wafer changing or process stepping, ensures that all pre-condition safety requirements are met before starting the next process.
- Upgrading and Replacement of Aging Production Lines: As the MKS CDN500 series has reached EOL (End of Life), it is often used as refurbished equipment or spare parts to maintain the operation of existing 200mm/300mm production lines.
- LED Status Indicator: Integrated LED indicator panels display the on/off status of digital I/O in real time, facilitating on-site troubleshooting of signal anomalies.
- Web Remote Debugging: Supports online diagnostic systems based on web browsers, allowing maintenance personnel to quickly identify connection and communication errors without disassembling the module.
- Loop Self-Test: The module possesses local logic judgment capabilities, monitoring the integrity of interlocking loops to prevent false safety feedback caused by wiring breaks.
- Real-Time Event Logging: In conjunction with the host computer, it can record precise timestamps of interlock triggers, aiding in fault tracing and analysis.