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CDN500-19 0190-07970

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The MKS CDN500-19 0190-07970 Interlock Module is an industrial safety control module designed for interlock logic management in semiconductor equipment.
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Technical specifications for CDN500-19 0190-07970

  • Manufacturer:
    MKS
  • Part Number:
    CDN500-19 0190-07970
  • Product Family:
    MKS
  • Operating Voltage:
    24 V DC
  • Communication:
    100BT Ethernet, Modbus/TCP protocol.
  • Response:
    Full I/O response time ≤ 5ms.
  • Control:
    Built-in processor, supports JavaScript distributed logic.
  • Diagnostics:
    All digital I/O with LED status indicators.
  • Power Consumption:
    5–10 W
  • Operating Temperature:
    -40°C to +85°C
  • Weight:
    0.48 kg
  • Estimated shipping dimensions:
    4x20.6x13cm
  • Tariff Code:
    8414100090
  • Country of origin:
    USA
  • Place of shipment:
    Xiamen, Fujian, China
By purchasing this item, you agree to the Terms & Conditions, ApterPower is not an authorized distributor for listed manufacturers or tradenames and therefore the manufacturer's warranty does not apply. All our products come with ApterPower's 1-year warranty.

More Information

Overview Manuals Specifications Monitoring Application Diagnostics

Features:

  • High-speed interlock control with response time ≤ 5ms, ensuring fast and reliable safety execution in automation systems.
  • Integrated Ethernet communication with Modbus/TCP protocol for stable industrial network connectivity.
  • Built-in JavaScript-based logic processing for flexible and distributed automation control.
The MKS CDN500-19 0190-07970 Interlock Module is widely applied in semiconductor manufacturing systems where safety and precision control are required. The MKS CDN500-19 0190-07970 operates with 100BT Ethernet communication and Modbus/TCP protocol, ensuring reliable integration into distributed control architectures.

The MKS CDN500-19 0190-07970 is equipped with a built-in processor supporting JavaScript-based logic execution, enabling advanced interlock functions within complex industrial environments. The MKS CDN500-19 0190-07970 also provides full I/O response within 5ms, ensuring fast safety reaction performance.

The MKS CDN500-19 0190-07970 is designed for MKS 3U standard card cage systems and operates under -40°C to +85°C conditions with 5–10W power consumption. The MKS CDN500-19 0190-07970 ensures stable operation in semiconductor tools, especially in Applied Materials systems where safety interlock control is critical.

The CDN500-19 0190-07970 MKS Interlock Module may still be available for purchase and support from Apter Power beyond End-Of-Life (EOL) by the manufacturer (OEM).
MKS CDN500-19 0190-07970 Interlock Module Manuals,Datasheets,Link Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.
MKS CDN500-19 0190-07970 Interlock Module Specs

General

  • Manufacturer MKS
  • Model CDN500-19 0190-07970
  • Condition New Original ready stock
  • Product Family CDN500-19,CDN500-4-10190-37669,CDN500-14 0190-04849
Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.
  • Multi-Signal Integration: Monitors multiple sets of analog, digital, and serial signals in a 3U high-density slot, ensuring that cavity environmental parameters remain within safe ranges.
  • High-Speed ​​Status Refresh: Provides approximately 5ms I/O response time, ensuring continuous high-frequency monitoring of the interlocking status of cavity gate valves and RF power supplies.
  • Distributed Logic Management: As a network I/O node, this module can execute preset monitoring logic locally, reducing the computational load on the central control PC.
  • IoT Connectivity: Distributed monitoring data is transmitted in real-time to the factory's main control system via standard Ethernet, enabling centralized management of the semiconductor production line.
  • Semiconductor Etching/Vacuum Deposition: Primarily used in AMAT Producer SE series cavities to manage cavity interlocks during thin film deposition or etching.
  • Personnel and Equipment Safety: When a maintenance door is detected to be open or an abnormal vacuum level is detected, the module immediately executes interlock actions, forcibly shutting down the high pressure or cutting off the gas supply.
  • Production Process Synchronization Control: During automatic wafer changing or process stepping, ensures that all pre-condition safety requirements are met before starting the next process.
  • Upgrading and Replacement of Aging Production Lines: As the MKS CDN500 series has reached EOL (End of Life), it is often used as refurbished equipment or spare parts to maintain the operation of existing 200mm/300mm production lines.
  • LED Status Indicator: Integrated LED indicator panels display the on/off status of digital I/O in real time, facilitating on-site troubleshooting of signal anomalies.
  • Web Remote Debugging: Supports online diagnostic systems based on web browsers, allowing maintenance personnel to quickly identify connection and communication errors without disassembling the module.
  • Loop Self-Test: The module possesses local logic judgment capabilities, monitoring the integrity of interlocking loops to prevent false safety feedback caused by wiring breaks.
  • Real-Time Event Logging: In conjunction with the host computer, it can record precise timestamps of interlock triggers, aiding in fault tracing and analysis.
Description
The MKS CDN500-19 0190-07970 Interlock Module is a high-performance safety control component designed for distributed industrial automation systems. It integrates a built-in processor supporting JavaScript-based distributed logic control, allowing flexible interlock execution within complex equipment architectures. With 100BT Ethernet communication and Modbus/TCP protocol support, the MKS CDN500-19 0190-07970 ensures stable and efficient data exchange in networked control environments.

In terms of performance, the MKS CDN500-19 0190-07970 Interlock Module provides a full I/O response time of less than or equal to 5ms, enabling fast and reliable safety decision-making. All digital I/O channels are equipped with LED status indicators for real-time diagnostics and system visibility. The module is designed with low power consumption between 5–10W, maintaining energy efficiency while operating under continuous industrial load conditions.

The MKS CDN500-19 0190-07970 Interlock Module operates within a wide temperature range of -40°C to +85°C, ensuring stable performance in harsh industrial environments. It is compatible with the MKS 3U standard card slot cage architecture, allowing seamless integration into existing system racks. This module is widely implemented in semiconductor manufacturing equipment, particularly in Applied Materials platforms, where it manages critical safety interlock functions for vacuum systems, gas delivery systems, and process flow control.
Alternative Names
CDN500-11 0190-08961 CDN500-7 0190-01871 CDN500-38 0190-17964 CDN500-19
Technical notes
The module operates at 24 V DC and uses 100BT Ethernet communication with Modbus/TCP protocol, providing a full I/O response time of ≤ 5 ms. It features a built-in processor supporting JavaScript distributed logic and includes diagnostics with LED status indicators on all digital I/O. The architecture is compatible with the MKS 3U standard card slot cage, with a power consumption of 5–10 W and an operating temperature range of -40°C to +85°C.
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FAQS

The following is a list of questions commonly asked by our customers. Please contact us if you have a question about our process that is not answered below.
What environment can the MKS CDN500-19 0190-07970 operate in?
The MKS CDN500-19 0190-07970 operates in temperatures from -40°C to +85°C with low power consumption of 5–10W.
How is the MKS CDN500-19 0190-07970 installed?
The MKS CDN500-19 0190-07970 is designed for MKS 3U standard card slot cage compatibility.
What diagnostics does the MKS CDN500-19 0190-07970 provide?
The MKS CDN500-19 0190-07970 features LED indicators on all digital I/O for real-time status monitoring.