The MKS 902-1112 pressure sensor integrates a compact design, integrated electronics, and sensor into a single unit, enabling fast, accurate, and repeatable pressure readings, thereby shortening process cycles.
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Technical specifications for 902-1112
Manufacturer:
MKS
Part Number:
902-1112
Product Family:
MKS
Full Scale Range (absolute):
1,000 Torr
Set Point Range:
1 to 1,000 Torr
Accuracy:
< 1% of reading
Resolution:
1 X 10-4 of F.S.
Calibration Gas:
Gas independent
Operating Temperature Range:
0° to 50°C (32° to 122°F)
Maximum Bakeout Temperature:
85°C (185°F), non-operating
Communication:
RS485 / RS232 / Analog
Weight:
0.1 kg
Estimated shipping dimensions:
4x4x6.3cm
Tariff Code:
8537101190
Country of origin:
Germany
Place of shipment:
Xiamen,Fujian,China
By purchasing this item, you agree to the Terms & Conditions, ApterPower is not an authorized distributor for listed manufacturers or tradenames and therefore the manufacturer's warranty does not apply. All our products come with ApterPower's 1-year warranty.
Description
The MKS 902-1112 is part of the Series 902 Transducer line, designed with a NW 16 KF connection and RS485 communication. It integrates a MEMS-based piezo sensor with advanced electronics, offering an economical solution for absolute pressure measurement that is independent of gas type.
The MKS 902-1112 features a measurement range from 1 to 1,000 Torr full scale, making it suitable for diverse applications such as semiconductor manufacturing, thin film coatings, freeze drying, lamp and light bulb production, medical devices, automotive, and aerospace industries.
This transducer combines a compact design with integrated electronics and sensor in a single unit, allowing for reduced process cycle times through fast, accurate, and repeatable pressure readings. Its robust stainless steel construction ensures reliability even in harsh process environments.
Ease of operation is enhanced through both analog output and digital communication, while process control is supported by a setpoint relay with fast response times. The MKS 902-1112 is CE marked and compliant with EMC Directive 89/336/EEC, ensuring adherence to international standards.
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FAQS
The following is a list of questions commonly asked by our customers. Please contact us if you have a question about our process that is not answered below.
The MKS 902-1112 is a Series 902 piezo transducer with a NW 16 KF connection and RS485 communication, integrating a MEMS-based piezo sensor with electronics for absolute pressure measurement.
What are the key design features of the MKS 902-1112?
The transducer features a compact design with integrated electronics and sensor, robust stainless steel construction for harsh processes, and fast, accurate, repeatable pressure measurements.
How is the MKS 902-1112 operated?
It offers both analog output and digital communication for ease of operation, with process control available via a setpoint relay with fast response times.